New PDF release: Advanced Microsystems for Automotive Applications 2000

By E. Mounier, S. Leroy, M. Waga (auth.), Dr. Sven Krüger, Wolfgang Gessner (eds.)

ISBN-10: 3642181465

ISBN-13: 9783642181467

ISBN-10: 3642621074

ISBN-13: 9783642621079

Microsystems are a big luck consider the auto undefined. so one can fulfil the purchasers' requests for protection comfort and automobile financial system, and to fulfill environmental standards, microsystems have gotten critical. therefore plenty of microsystem functions got here into the dialogue. With the foreign convention AMAA 2000, VDI/VDE-IT offers a platform for the dialogue of all MST proper parts for automobile functions. The convention complaints assemble the papers by means of authors from vehicle providers and manufacturers.

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Afte r oxidation , the standard field oxide in the area of the predetermin ed senso r cells is covered with Poly-Silico n, which is norm ally used for resistors. This PolySilicon is perforated with pin-hol es in a RIE dry etch proc ess . Th e underlying field-oxide is removed by a we t etch process thro ugh the pin-h oles. After removal of the field-oxide, the pin-holes in the Poly-Silicon are sealed. Th ese additional steps to fo rm the flexible diaphr agm are integrat ed in a standa rd BiCMOS proc ess.

A . Nepijko, M. KIimenkov , H. -J. Freund , J. Vac . Sci TechnoI. A17, 577 (1999). [5] V. Khatko , R. Soltis , J. 2 , P. 475-479 Monolithic Integrated Pressure Sensor Ics V . o. com Keywords: mo nolithic integration, press ure sensor, su rface micromachining Abstract Infineon Techno logie s AG (formerl y Siemens HL) deve loped a novel surface micromachining technolog y for pressure sensors . These senso rs are desig ned for barometric air pressure sensing in automotive applications. T he surface micromachining technology enab les the product to be calibra ted in the final package through on-chip calibra tion by mea ns of low-power fuses and offers the possibility of digital interfacing .

4601 Six Forks Rd. C. com Abstract In addition to pressu re senso rs for engine cont rol and accelerometers for airbag sys tems , yaw rate sensors and gyros are foreseen as a recent automo tive challen ge fo r MEMS based components . Such devic es , when using co riolis forces as a sensing prin ciple , lead to extremely complex sys tem design . Th e moving structure has to be rotationally exc ited and tightly co ntrolled . Th en , the structure tilt , indu ced by the co riolis force, has to be sim ultaneo usly measur ed .

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Advanced Microsystems for Automotive Applications 2000 by E. Mounier, S. Leroy, M. Waga (auth.), Dr. Sven Krüger, Wolfgang Gessner (eds.)

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